0040_[New] Long WD Tilt Sensor

This product is a Laser Autocollimetor with excellent performance of 1,000mm±150mm working distance (WD).It can also measure with a working distance of up to 10m.


It can also measure with a working distance of up to 10m.
The combination of the optical system and signal processing part enables simultaneous high-speed measurement of tilt (θX, θY) (1,600 times/second) with this single solution.
Special note should be made of its long working distance, which allows tilt measurements to be placed on the floor or ceiling of the equipment in which it is to be installed. This characteristic allows for installation in equipment, as well as inspection and adjustment of long-distance moving mechanisms and evaluation equipment for long-distance sensing devices.
This solution is also designed for easy installation.
For more information, please see this video.

Please also refer to the following documents

【●Long WD Tilt Sensor Documentation】

Application examples are also available.
Case studies in the semiconductor industry are also available.

【●Semiconductor Industry Case Study】


This product is an integrated optical sensor with a signal processor built into the housing. Since the measured values are output from the main body of the optical sensor, it takes up less space and allows for a greater flexibility in the installation of equipment.
For example, it can be used to prevent crashes during semiconductor wafer handling and to monitor wafer warpage.
Compared to conventional integrated tilt sensors, the new product is smaller in size and achieves a high measurement speed of 1,600 times/second.
For details, please refer to the following document.

【●Integrated Tilt Sensor Documentation】

In addition to this product, we are developing many other inspection and measurement devices for semiconductors.
Please refer to the application examples below.

【●Examples in the semiconductor industry】

Here is a summary of case studies for the semiconductor industry in optical tilt sensors such as ultra-compact tilt sensors (laser autocollimators).












●The document of semiconductor case studies is
Click here↓

【●Semiconductor industry case studies】

Please feel free to contact us if you have any questions about measurement or inspection in the semiconductor manufacturing process.
We are looking forward to hearing from you.

Autocollimator is a kind of optical measurement sensor, a solution mainly available for adjustment and evaluation of optical systems.
It enables non-contact tilt measurement simply by pointing the measurement light on the object to be measured.
This solution enables optimization of optical equipment by accurately measuring and adjusting the optical axis and optical path of optical systems.
In particular, it is used to precisely adjust the position and tilt of lenses, mirrors, and other optical elements.
Autocollimators have long been used in the optical industry.
This product used a low-intensity halogen lamp.
Because of the low intensity of the light source, large diameter lenses were required to bring in a large amount of light into the device.
Therefore, the device was huge and heavy.
We have realized a compact, high-sensitivity, high-speed autocollimator by using a semiconductor laser as the light source and a semiconductor sensor as the detector.



















Our autocollimator (product name: ultra-compact tilt sensor. Our autocollimator (product name: ultra-compact tilt sensor, model: TM-2070) uses a high-brightness laser diode and compact optical components.
It can measure low reflection objects and minute objects that conventional autocollimators could not handle.
Furthermore, by receiving light with a CMOS camera, image processing is possible and numerical control of measurement data is possible.


















Please dispel the image of autocollimators as large and heavy.
Try our ultra-compact tilt sensor TM-2070.
We have a demo unit ready and waiting for your contact.
For more information, please contact us from the following link.

Our ultra-compact tilt sensor (autocollimator) is characterized by its extremely compact size.
The normal working distance (WD: Working Distance) is 0~110mm (±70min. range).
However, WD exceeding 110mm may also be used. For applications such as optical axis alignment, there are cases where the working distance is longer than 500mm.
In order to meet the demand for products with even longer working distances, we have also developed a long WD tilt sensor (autocollimator).
Working distance: 1000 mm or longer (can also be used at 10 m or longer)
Measuring range: ±0.25deg (±15min, circular range)
Repeatability (resolution): about 0.1min



For more information, please contact us from the following link.

By using multiple ultra-compact tilt sensors (autocollimators), which can measure angles without contact, it is possible to support a variety of applications.
For example, by installing the ultra-compact tilt sensor (autocollimator) in opposing positions and measuring the angles of two sides of the object to be measured, the parallelism of the object can be instantly confirmed.


If you are interested in non-contact, high-precision parallelism measurement, please contact us from the following link.

By combining multiple ultra-compact tilt sensors (autocollimators), which can measure angles without contact, it is possible to support a variety of applications.
For example, by setting the ultra-compact tilt sensor (autocollimator) in a perpendicular position and measuring the angle between two sides of the object to be measured, it is possible to instantly measure the squareness of the object.

If you have any request for non-contact high-precision squareness measurement, please contact us from the following link.

We have achieved a measurement range (±15 deg.) that exceeds the ±10 deg. measurement range of our existing autocollimator.
This is the first non-contact optical sensor* in the world that employs the laser autocollimator method.
*As of April 2024, according to our own research.








Measurement of actuators in cameras for smartphones, especially periscope cameras and camera module tilt OIS cameras.
Tilt angle inspection of the gimbal mechanism that moves the camera mounted on a drone.
Measurement of scanning mirrors mounted on LiDAR, etc.
Tilt angle inspection of MEMS mirrors etc.
Please see below for a demonstration of the measurement.
The object to be measured (mirror) is placed on a 2-axis gimbal, and the tilt angle of the gimbal is measured.
Measurement values are displayed.
The measurement value can also be output as a voltage at the same time.
(DC±5V=θ±15deg Sampling frequency: 10kHz)

If you are interested, please contact us from the following.

By connecting the GP-2000 signal processing unit for ultra-small tilt sensors to a PC and using the GP 2000 Paramset software, the measurement spot image can be confirmed. 
By checking the actual spot image, it is possible to confirm that the measurement is being performed under normal conditions.

This function is supported by GP-2000 software Ver. 1.01 or higher.
Please contact us for details.