0042_[New] Thickness Measurement Sensor

This is a follow-up report of the thickness measurement sensor under development introduced in "0037_[New] Thickness Measurement Sensor".
We are pleased to report that a demonstration unit has been completed.

<Features>
Calibration to the origin (thickness 0μm) is possible in the sensor.
The sensor is very compact (W100×D120×H200 (mm)) and can be placed anywhere. It can be placed anywhere.
For details, please refer to the following document.
Thickness Measurement Sensor Documentation

厚さ測定センサ_オートコリメータ

Thickness Measurement Sensor_Picture

If you have any interest in this product, please contact us from the following link.

【●Thickness Measurement Sensor】

Our latest displacement tilt sensor is the product of our cutting-edge technology.

This product boasts outstanding performance thanks to the complete integration of the optical system and signal processing part. One of its remarkable features is its ability to measure tilt (θX, θY) displacement (Z) at high speed and simultaneously.
Data can be measured in real time at an impressive rate of 1,000 cycles/second.
This displacement-tilt sensor will be a revolutionary advance in the industry. Its integrated technology enables 3-axis measurement in a single solution, increasing productivity and accuracy.
Its high-speed measurement minimizes process downtime and supports efficient operations.

For more information, please refer to the following documents

【●Integrated Displacement/Tilt Sensor Documentation】

Please refer to the following document for application examples.

【●Semiconductor industry case studies】

Demonstration machine of thickness measurement sensor has been completed.
This product is a revolution in non-contact measurement. It will revolutionize the manufacturing process by quickly and accurately measuring the thickness of glass, parallel plates, semiconductor wafers, thin film resist, films used for patterning, light-sensitive films, transparent conductive films, barrier films, and more.Easy operation and error-free thickness measurement. Using the latest technology, this sensor is a completely different product from conventional contact micrometers. Maximize the efficiency of your production line, R&D, and quality control.

 

●The data of the thickness measurement sensor is
Click here↓

【●Thickness Measurement Sensors】

If you are interested in our products, please contact us from the following link.

Here is a summary of case studies for the semiconductor industry in optical tilt sensors such as ultra-compact tilt sensors (laser autocollimators).

オートコリメータ

 

 

 

 

 

 

 

 

 

 

●The document of semiconductor case studies is
Click here↓

【●Semiconductor industry case studies】

Please feel free to contact us if you have any questions about measurement or inspection in the semiconductor manufacturing process.
We are looking forward to hearing from you.

Our ultra-compact tilt sensor (autocollimator) is characterized by its extremely compact size.
The normal working distance (WD: Working Distance) is 0~110mm (±70min. range).
However, WD exceeding 110mm may also be used. For applications such as optical axis alignment, there are cases where the working distance is longer than 500mm.
In order to meet the demand for products with even longer working distances, we have also developed a long WD tilt sensor (autocollimator).
Working distance: 1000 mm or longer (can also be used at 10 m or longer)
Measuring range: ±0.25deg (±15min, circular range)
Repeatability (resolution): about 0.1min

チルトセンサ'(オートコリメータ)_長距離測定

 

For more information, please contact us from the following link.

By using multiple ultra-compact tilt sensors (autocollimators), which can measure angles without contact, it is possible to support a variety of applications.
For example, by installing the ultra-compact tilt sensor (autocollimator) in opposing positions and measuring the angles of two sides of the object to be measured, the parallelism of the object can be instantly confirmed.

オートコリメータで平行度測定

If you are interested in non-contact, high-precision parallelism measurement, please contact us from the following link.

By combining multiple ultra-compact tilt sensors (autocollimators), which can measure angles without contact, it is possible to support a variety of applications.
For example, by setting the ultra-compact tilt sensor (autocollimator) in a perpendicular position and measuring the angle between two sides of the object to be measured, it is possible to instantly measure the squareness of the object.

If you have any request for non-contact high-precision squareness measurement, please contact us from the following link.

This optical sensor can measure the position (X-Y) of an object with non-contact and high accuracy.
This optical sensor is ideal for measurement and inspection of moving mechanisms in the X-Y direction.
It has been adopted for inspection of actuators with image stabilization function of lens shift and sensor shift method.
Please refer to the specifications below.
Specifications and product names are subject to change.

 
 
 
 
 

 

 

 

 

 

 

 

If you have any questions about the product, please contact our sales representative or click below.