Development Background
When multiple measuring instruments are used, it is complicated to manage the sensor head and processor unit. We developed this product in response to such customer requests.
Based on the most requested specifications of measuring range and working distance, the processor is integrated and the measuring speed is high. We have developed a compact size that can be incorporated into equipment.
Features
1. Sensor and processor, integrated
2. Compact, can be incorporated into equipment and jigs
3. High-speed measurement (1.6K data/s)
Product Information
| Item | Integrated Tilt Sensor (Small Type) |
| Model | ST-3100 |
| Measurement Sample | Optical plane（reflectance 80% more） |
| Working Distance | 0～200mm |
| Measurement Area | +/-54arcmin*1 |
| Repeatability*2 | 0.025arcmin |
| Linearity*3 | +/-0.15% of F.S. |
| Source | 660+/-10nm |
| Beam Diameter | φ1mm*4 |
| Output Rate | 1,600 times/sec |
| Size（Without protrusions） | W65 D75 H34mm |
*1. Circular range.
*2. Range of variation (6σ) of the average of 16 measurements of our standard sample under static conditions.
*3. The error against the ideal straight line when measuring our standard sample at 140 mm W.D. is shown. It may vary depending on the object to be measured.
*4. Diameter (1/e² width) just after sensor injection.
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Suppression of variation in inspected objects during robot chucking
Downloads
Software
*You can download the software from the e-mail that will be automatically returned to the e-mail address you enter in the form below.
Integrated Tilt Sensor (Small Type) | Software
Outline Drawing
*You can download the outline drawing from the e-mail that will be automatically returned to the e-mail address you enter in the form below.
Integrated Tilt Sensor (Small Type) | Outline Drawing