
Development Background
Is there any measuring instrument with higher resolution than the ultra-compact tilt sensor? We developed this sensor in response to such customer requests.
A new world of measurement begins with the birth of the high resolution tilt sensor that surpasses the 1-second resolution barrier, the highest in our company’s history.
Features
1. World’s highest class high resolution (0.1 sec/0.5 μrad)
2. Separate processor and sensor for various applications
3. Easy measurement with included software (for Windows)
Product Information
| Item | High Resolution Tilt Sensor |
| Model | HR-1100 |
| Measurement Sample | Optical plane(reflectance 80% more) |
| Working Distance | 0~1000mm |
| Measurement Area | ±10arcmin* |
| Repeatability | 0.1 arcsec |
| Linearity | ±0.1% of F.S.(±1.2arcsec equates) |
| Source | 660±10nm |
| Beam Diameter | φ3mm |
| Output Rate | 30 times/sec |
| Size(Without protrusions) | W80 D120 H30mm |
*Circular range
Product Documentation
Related Solutions
Downloads
Operation Manuals
*You can download the operating instructions from the e-mail that will be automatically returned to the e-mail address you enter in the form below.
High Resolution Tilt Sensor | Operation Manuals
Software
*You can download the software from the e-mail that will be automatically returned to the e-mail address you enter in the form below.
High Resolution Tilt Sensor | Software
Outline Drawing
*You can download the outline drawing from the e-mail that will be automatically returned to the e-mail address you enter in the form below.
High Resolution Tilt Sensor | Outline Drawing