Development Background
Is there any measuring instrument with higher resolution than the ultra-compact tilt sensor? We developed this sensor in response to such customer requests.
A new world of measurement begins with the birth of the high resolution tilt sensor that surpasses the 1-arcsecond resolution barrier, the highest in our company’s history.
Features
1. World-class high resolution (0.1 arcsec / 0.5 μrad)
2. Separate sensor and processor design for a wide range of applications
3. Easy measurement with the included software
Product Information
| Item | High Resolution Tilt Sensor |
| Model | HR-1100 |
| Measurement Sample | Optical plane（reflectance 80% more） |
| Working Distance | 0～1000mm |
| Measurement Area | ±10arcmin* |
| Repeatability | 0.1 arcsec |
| Linearity | ±0.1% of F.S.（±1.2arcsec equates） |
| Source | 660±10nm |
| Beam Diameter | φ3mm |
| Output Rate | 30 times/sec |
| Size（Without protrusions） | W80 D120 H30mm |
*Circular range
