Assessment of Pitch and Yaw Motions of a Precision Stage

・Issues

In precision stages, such as those used in exposure systems, even slight pitching or yawing during long-stroke movements is unacceptable.

Is there a measurement method that can evaluate the minute rotational errors accompanying the stage’s stroke motion easily and with high accuracy?

・Solutions

By using a tilt sensor, accurate and high-precision angle measurement can be easily achieved regardless of the measurement distance.

It is possible to measure both pitching and yawing simultaneously in a non-contact and real-time manner during stroke motion.