{"id":924,"date":"2024-12-10T13:33:32","date_gmt":"2024-12-10T04:33:32","guid":{"rendered":"https:\/\/www.katsura-opto.com\/?post_type=case&#038;p=924"},"modified":"2024-12-12T13:22:51","modified_gmt":"2024-12-12T04:22:51","slug":"semiconductor-09","status":"publish","type":"case","link":"https:\/\/www.katsura-opto.com\/en\/case\/semiconductor-09","title":{"rendered":"Optical axis adjustment of semiconductor wafer projection (exposure) lens block"},"content":{"rendered":"\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" width=\"653\" height=\"435\" src=\"https:\/\/www.katsura-opto.com\/wp-content\/uploads\/2024\/10\/090-1_lenz.png\" alt=\"Optical axis adjustment of semiconductor wafer projection (exposure) lens block\" class=\"wp-image-460\" srcset=\"https:\/\/www.katsura-opto.com\/wp-content\/uploads\/2024\/10\/090-1_lenz.png 653w, https:\/\/www.katsura-opto.com\/wp-content\/uploads\/2024\/10\/090-1_lenz-300x200.png 300w\" sizes=\"(max-width: 653px) 100vw, 653px\" \/><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\"><\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" width=\"478\" height=\"318\" src=\"https:\/\/www.katsura-opto.com\/wp-content\/uploads\/2024\/12\/009-2e_heikoudo.png\" alt=\"Optical axis adjustment of semiconductor wafer projection (exposure) lens block\" class=\"wp-image-958\" srcset=\"https:\/\/www.katsura-opto.com\/wp-content\/uploads\/2024\/12\/009-2e_heikoudo.png 478w, https:\/\/www.katsura-opto.com\/wp-content\/uploads\/2024\/12\/009-2e_heikoudo-300x200.png 300w\" sizes=\"(max-width: 478px) 100vw, 478px\" \/><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" width=\"902\" height=\"601\" src=\"https:\/\/www.katsura-opto.com\/wp-content\/uploads\/2024\/12\/009-3e_heikoudo.png\" alt=\"Optical axis adjustment of semiconductor wafer projection (exposure) lens block\" class=\"wp-image-959\" srcset=\"https:\/\/www.katsura-opto.com\/wp-content\/uploads\/2024\/12\/009-3e_heikoudo.png 902w, https:\/\/www.katsura-opto.com\/wp-content\/uploads\/2024\/12\/009-3e_heikoudo-300x200.png 300w, https:\/\/www.katsura-opto.com\/wp-content\/uploads\/2024\/12\/009-3e_heikoudo-768x512.png 768w\" sizes=\"(max-width: 902px) 100vw, 902px\" \/><\/figure>\n<\/div>\n<\/div>\n\n\n\n<p class=\"has-red-color has-text-color has-link-color has-medium-font-size wp-elements-fdfd8f7cc827a72fd42741283006935e\"><strong>\u30fbIssues<\/strong><\/p>\n\n\n\n<p>Is there a way to build projection lens blocks for wafer exposure systems without variation?\u3000<\/p>\n\n\n\n<p class=\"has-green-color has-text-color has-link-color has-medium-font-size wp-elements-014c0840d496b86729c1eb58a9e71089\"><strong>\u30fbSolutions<\/strong><\/p>\n\n\n\n<p>Tilt sensor enables non-contact measurement of the optical axis of the projection lens block, photomask, and lens tilt.This leads to reduced takt time and improved variability.<\/p>\n\n\n\n<p><\/p>\n","protected":false},"author":2,"featured_media":460,"template":"","meta":{"_acf_changed":true,"_locale":"en_US","_original_post":"https:\/\/www.katsura-opto.com\/?post_type=case&#038;p=133"},"case-cat":[8],"case-tag":[34,33,32,31],"class_list":["post-924","case","type-case","status-publish","has-post-thumbnail","hentry","case-cat-semiconductor","case-tag-34","case-tag-33","case-tag-32","case-tag-31","en-US"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.katsura-opto.com\/wp-json\/wp\/v2\/case\/924","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.katsura-opto.com\/wp-json\/wp\/v2\/case"}],"about":[{"href":"https:\/\/www.katsura-opto.com\/wp-json\/wp\/v2\/types\/case"}],"author":[{"embeddable":true,"href":"https:\/\/www.katsura-opto.com\/wp-json\/wp\/v2\/users\/2"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.katsura-opto.com\/wp-json\/wp\/v2\/media\/460"}],"wp:attachment":[{"href":"https:\/\/www.katsura-opto.com\/wp-json\/wp\/v2\/media?parent=924"}],"wp:term":[{"taxonomy":"case-cat","embeddable":true,"href":"https:\/\/www.katsura-opto.com\/wp-json\/wp\/v2\/case-cat?post=924"},{"taxonomy":"case-tag","embeddable":true,"href":"https:\/\/www.katsura-opto.com\/wp-json\/wp\/v2\/case-tag?post=924"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}