{"id":920,"date":"2024-12-10T13:28:19","date_gmt":"2024-12-10T04:28:19","guid":{"rendered":"https:\/\/www.katsura-opto.com\/?post_type=case&#038;p=920"},"modified":"2025-04-18T14:56:59","modified_gmt":"2025-04-18T05:56:59","slug":"semiconductor-05","status":"publish","type":"case","link":"https:\/\/www.katsura-opto.com\/en\/case\/semiconductor-05","title":{"rendered":"Non-contact measurement of semiconductor wafer tilt and blur during spin-coating"},"content":{"rendered":"\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" width=\"878\" height=\"586\" src=\"https:\/\/www.katsura-opto.com\/wp-content\/uploads\/2024\/10\/006-1_ingotto.png\" alt=\"Non-contact measurement of semiconductor wafer tilt and blur during spin-coating\" class=\"wp-image-451\" srcset=\"https:\/\/www.katsura-opto.com\/wp-content\/uploads\/2024\/10\/006-1_ingotto.png 878w, https:\/\/www.katsura-opto.com\/wp-content\/uploads\/2024\/10\/006-1_ingotto-300x200.png 300w, https:\/\/www.katsura-opto.com\/wp-content\/uploads\/2024\/10\/006-1_ingotto-768x513.png 768w\" sizes=\"(max-width: 878px) 100vw, 878px\" \/><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" width=\"628\" height=\"419\" src=\"https:\/\/www.katsura-opto.com\/wp-content\/uploads\/2024\/12\/006-2e_spin.png\" alt=\"Non-contact measurement of semiconductor wafer tilt and blur during spin-coating\" class=\"wp-image-956\" srcset=\"https:\/\/www.katsura-opto.com\/wp-content\/uploads\/2024\/12\/006-2e_spin.png 628w, https:\/\/www.katsura-opto.com\/wp-content\/uploads\/2024\/12\/006-2e_spin-300x200.png 300w\" sizes=\"(max-width: 628px) 100vw, 628px\" \/><\/figure>\n<\/div>\n<\/div>\n\n\n\n<p class=\"has-red-color has-text-color has-link-color has-medium-font-size wp-elements-fdfd8f7cc827a72fd42741283006935e\"><strong>\u30fbIssues<\/strong><\/p>\n\n\n\n<p>Is it possible to measure semiconductor wafers (inclination at high speed rotation) in the spin-coater process in a simple, non-contact manner?<\/p>\n\n\n\n<p class=\"has-green-color has-text-color has-link-color has-medium-font-size wp-elements-014c0840d496b86729c1eb58a9e71089\"><strong>\u30fbSolutions<\/strong><\/p>\n\n\n\n<p>By measuring the angle with a tilt sensor, the tilt of semiconductor wafers and blurring during high-speed rotation can be easily and contactlesslychecked during the spin-coater process. It also improves the yield of resist solution coating process.<\/p>\n\n\n\n<p><\/p>\n","protected":false},"author":2,"featured_media":451,"template":"","meta":{"_acf_changed":true,"_locale":"en_US","_original_post":"https:\/\/www.katsura-opto.com\/?post_type=case&#038;p=130"},"case-cat":[8],"case-tag":[101,17],"class_list":["post-920","case","type-case","status-publish","has-post-thumbnail","hentry","case-cat-semiconductor","case-tag-101","case-tag-17","en-US"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.katsura-opto.com\/wp-json\/wp\/v2\/case\/920","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.katsura-opto.com\/wp-json\/wp\/v2\/case"}],"about":[{"href":"https:\/\/www.katsura-opto.com\/wp-json\/wp\/v2\/types\/case"}],"author":[{"embeddable":true,"href":"https:\/\/www.katsura-opto.com\/wp-json\/wp\/v2\/users\/2"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.katsura-opto.com\/wp-json\/wp\/v2\/media\/451"}],"wp:attachment":[{"href":"https:\/\/www.katsura-opto.com\/wp-json\/wp\/v2\/media?parent=920"}],"wp:term":[{"taxonomy":"case-cat","embeddable":true,"href":"https:\/\/www.katsura-opto.com\/wp-json\/wp\/v2\/case-cat?post=920"},{"taxonomy":"case-tag","embeddable":true,"href":"https:\/\/www.katsura-opto.com\/wp-json\/wp\/v2\/case-tag?post=920"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}